適合產業界使用的高階系統 : DWL 4000
電子束、組件裝載模型，大幅度提升繪畫的速度

DWL4000 雷射光繪系統對於公司成本效益、高解析度的要求、光罩和基板尺寸範圍可至400 mm × 400 mm2(mm平方) 等，DWL 4000 是您最佳的解決方案。
DWL 4000 系統利用各式應用軟件，把複雜的微構造(micro-structures)做最佳的解決。如： MEMS、 SAW Devices、ASICS、MCMs、Integrated Optics and Displays。
DWL 4000 產品線包括兩種模式，DWL 4000DD和可處理更高效能的DWL 4000FBM。此系統可適用於客製化的雷射設備，幾乎任何光阻劑都可曝光。

The DWL 4000 line of laser lithography systems is an ideal solution to cost effective, high resolution, mask and wafer patterning up to 400mm x 400mm. The DWL 4000 systems are utilized in a variety of applications that require complex micro-structures, such as: MEMS, SAW Devices, ASICS, MCMs, Integrated Optics and Displays.

The DWL 4000 line consists of two models, the DWL 4000DD and the higher throughput DWL 4000FBM. These systems can be outfitted with customized laser sources, making it possible to expose nearly any photoresist.