The new Volume Pattern Generator (VPG) line of large area lithography systems is a milestone in technological innovation and product development from Heidelberg Instruments, based on a patented vast exposure process parallelization. VPG is a reliable and economical solution, ideal for high volume production of today's demanding photomasks in electronic packaging, color filters and other applications requiring high resolution features on large areas with excellent image quality and registration.

The VPG can be configured with various stage dimensions designed to accommodate substrate sizes of 1600mm by 1400mm, 1100mm by 1100mm and 800mm by 800mm. These systems can be equipped with air-bearing stage, semi or fully automatic feeder for substrate loading and a UV laser source with an output of up to 20W. Smaller write grid ensures excellent edge roughness and stripe butting. The automatic calibration of stage positioning is achieved with great efficiency using the Stage Map Correction.