μPG101，非常適合用於少量光罩的繪圖工作。價格不但經濟實惠且操作簡單容易。雖然是小型繪圖機(61cm × 74cm × 50cm)，但是可接受3D曝光的模式，也可在光罩中製造複雜的3D構造。

The μPG 101 is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. It basically works like a desktop printer - just design your microstructures and press the print button. The system can be used for applications like MEMS, BioMEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high resolution microstructures.
The μPG 101 offers a very small footprint of only 60 x 75 cm2, featuring a compact design with all electronic components integrated into the system. A small separate unit provides electric power and is used to regulate the vacuum and compressed air. A personal computer is used for system control.
This tabletop system represents the perfect tool for writing features down to 5 μm size on areas of up to 100 x 100 mm2. It provides an easy and fast way to create the microstructures needed for your business or research.